Surface textured MF-sputtered ZnO films for microcrystalline silicon-based thin-film solar cells

Author:

Hüpkes J.,Rech B.,Kluth O.,Repmann T.,Zwaygardt B.,Müller J.,Drese R.,Wuttig M.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. New materials and deposition techniques for highly efficient silicon thin film solar cells

2. Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering

3. State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules

4. J. Strümpfel, G. Beister, D. Schulze, M. Kammer, S. Rehn, in: 40th Annual Technical Conference of the Society of Vacuum Coaters, New Orleans, USA, April 12–17, 1997, p. 179.

5. T. Repmann, B. Sehrbrock, Ch. Zahren, H. Siekmann, B. Rech, this conference.

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