Preparation of Al-doped hydrogenated nanocrystalline cubic silicon carbide by VHF-PECVD for heterojunction emitter of n-type crystalline silicon solar cells

Author:

Hamashita Daisuke,Miyajima Shinsuke,Konagai Makoto

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. T. Kinoshita, D. Fujishima, A. Yano, A. Ogane, S. Tohoda, K. Matsuyama, Y. Nakamura, N. Tokuoka, H. Kanno, H. Sakata, M. Taguchi, E. Maruyama, The approaches for high efficiency HITTM solar cell with very thin (<100μm) silicon wafer over 23%, in: Proceedings of the 26th European Photovoltaic Solar Energy Conference, 2011 pp. 871–874.

2. Intrinsic optical absorption in single-crystal silicon carbide;Philipp;Physical Review,1958

3. Optical absorption in n-type cubic SiC;Patrick;Physical Review,1969

4. Large‐band‐gap SiC, III–V nitride, and II–VI ZnSe-based semiconductor device technologies;Morkoc;Journal of Applied Physics,1994

5. A calculation of valence band masses, exciton and acceptor energies and the ground state properties of the electron–hole liquid in cubic SiC;Bimberg;Solid State Communications,1981

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