Model for reactive sputtering Optimisation results for YBaCuO thin films deposited on polycrystalline zirconia substrates
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference8 articles.
1. The influence of target oxygen on the YBa2Cu3O6+δ direct‐current magnetron sputtering process
2. Energy distribution of negative O−and OH−ions emitted from YBaCuO and iron garnet targets by dc and rf magnetron sputtering
3. Role of hydrogen in the growth of Y1Ba2Cu3O7on MgO substrates by off‐axis magnetron sputtering
4. Critical parameters in the single‐target sputtering of YBa2Cu3O7
5. Optimization results for YBaCuO film sputtering on polycrystalline zirconia substrates with various growth and oxygenation conditions
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1. Nanosized Pinning Centers in the Rare Earth-Barium-Copper-Oxide Thin-Film Superconductors;Nanomaterials;2020-07-22
2. YBCO Thin Film Sputtering: An Efficient Way to Promote Microwave Properties;IEEE Transactions on Appiled Superconductivity;2005-06
3. Deposition of YBa2Cu3O7−x superconducting films by magnetron sputtering and water vapour addition to the sputtering gas;Vacuum;2004-11
4. Diagnostics of sputtering plasma variations affecting Y–Ba–Cu–O thin film growth and properties;Superconductor Science and Technology;2004-07-02
5. Optical emission spectroscopy of the plasma during sputter deposition of YBCO films for microwave applications;IEEE Transactions on Appiled Superconductivity;2003-06
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