High-speed observation of damage generation during ultrashort pulse laser processing of dielectric materials-Reference-Cited by-同舟云学术

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High-speed observation of damage generation during ultrashort pulse laser processing of dielectric materials

Published:2022 Issue: Volume:111 Page:597-600
ISSN:2212-8271
Container-title:Procedia CIRP
language:en
Short-container-title:Procedia CIRP

Author:

Ito Yusuke,Sun Huijie,Jo Hiroshi,Hattori Junya,Sugita Naohiko

Funder

Japan Society for the Promotion of Science

Publisher

Elsevier BV

Subject

General Medicine

Reference14 articles.

1. Ultrafast laser processing of materials: From science to industry;Malinauskas;Light Sci Appl,2016

2. Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture;Sugioka;Applied Physics A,2005

3. Femtosecond laser micromachining in transparent materials;Gattass;Nature Photonics,2008

4. Experimental analysis of glass drilling with ultrashort pulse lasers;Shinomoto;International Journal of Automation Technology,2016

5. Mechanisms of damage formation in glass in the process of femtosecond laser drilling;Ito;Appl Phys A Mater Sci Process,2018

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