Material and Energy Efficiency Analysis of Low Pressure Chemical Vapor Deposition of TiO2 Film

Author:

Wang Fenfen,Zhu Nanjing,Li Tao,Zhang Hong-Chao

Publisher

Elsevier BV

Subject

General Medicine

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It;ACS Materials Au;2023-04-27

2. Geometric Optimization of a Product Using the Design for Disassembly (DFD) Criteria;Explorations in the History and Heritage of Machines and Mechanisms;2022

3. Green CVD—Toward a sustainable philosophy for thin film deposition by chemical vapor deposition;Journal of Vacuum Science & Technology A;2021-09

4. Titanium Dioxide Nanoparticles;Handbook of Nanomaterials and Nanocomposites for Energy and Environmental Applications;2021

5. Titanium Dioxide Nanoparticles;Handbook of Nanomaterials and Nanocomposites for Energy and Environmental Applications;2020

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