1. Laser interference fabrication of large-area functional periodic structure surface[J];Wang;Frontiers in Mechanical Engineering,2018
2. Wireless MEMS-Based Accelerometer Sensor Boards for Structural Vibration Monitoring: A Review[J];Sabato;IEEE Sensors Journal,2017
3. Fabrication of Novel MEMS Microgrippers by Deep Reactive Ion Etching With Metal Hard Mask[J];Bagolini;IEEE\/ASME Journal of Microelectromechanical Systems,2017
4. MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design[J];Torrents;Journal of Micromechanics and Microengineering,2010
5. Tilmans H A, Ziad H, Jansen H V, et al. Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab[J]. 2017.