Effects of gas flow rate on diamond deposition in a microwave plasma reactor-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Effects of gas flow rate on diamond deposition in a microwave plasma reactor

Published:2006-12 Issue:4 Volume:515 Page:1970-1975
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Chen W.,Lu X.,Yang Q.,Xiao C.,Sammynaiken R.,Maley J.,Hirose A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Low-Pressure, Metastable Growth of Diamond and "Diamondlike" Phases

2. Generation of diamond nuclei by electric field in plasma chemical vapor deposition

3. Studies on nucleation process in diamond CVD: an overview of recent developments

4. Effect of deposition parameters on different stages of diamond deposition in HFCVD technique

5. Rate limitation in low pressure diamond growth

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fundamental Theory of Electromagnetic Spectrum, Dielectric and Magnetic Properties, Molecular Rotation, and the Green Chemistry of Microwave Heating Equipment;Green Chemical Synthesis with Microwaves and Ultrasound;2024-03-28

2. Machine Learning for Retrieving Optimal Process Parameters Toward Artificial Diamond Synthesis;Lecture Notes in Networks and Systems;2024

3. Investigation on the influence of the gas flow mode around substrate on the deposition of diamond films in an overmoded MPCVD reactor chamber;Vacuum;2020-12

4. Diamond chemical vapor deposition using a zero-total gas flow environment;Diamond and Related Materials;2020-11

5. Nanodiamonds: Emerging face of future nanotechnology;Carbon;2019-03

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3