Author:
Wang Y.H.,Moitreyee M.R.,Kumar R.,Wu S.Y.,Xie J.L.,Yew P.,Subramanian B.,Shen L.,Zeng K.Y.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. The National Technology Roadmap for Semiconductors-Interconnect,2001
2. Proceedings of International Electron Devices Meeting;Bohr,1995
3. Proceedings of the Third International Dielectrics for ULSI Multilevel Interconnection Conference, Santa Clara, CA, USA, February 10–11;Sugahara,1997
4. Development of a Low-Dielectric-Constant Polymer for the Fabrication of Integrated Circuit Interconnect
5. Low Dielectric Constant Materials for ULSI Interconnects
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