The enhanced mechanical properties for Hf6Ta2O17 thin film through component segregation
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Published:2024-06
Issue:
Volume:799
Page:140408
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ISSN:0040-6090
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Container-title:Thin Solid Films
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language:en
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Short-container-title:Thin Solid Films
Author:
Feng Weibin,
Sun YuORCID,
Fan Chaofan,
Luo JunhuiORCID,
Zhu Wangtao,
Yang Li,
Zhou Yichun