Study on the surface interaction mechanism, corrosion inhibition effect and the synergistic action of potassium oleate and fatty alcohol polyoxy ethylene ether on copper film chemical mechanical polishing for giant large scale integrated circuit-Reference-Cited by-同舟云学术

Study on the surface interaction mechanism, corrosion inhibition effect and the synergistic action of potassium oleate and fatty alcohol polyoxy ethylene ether on copper film chemical mechanical polishing for giant large scale integrated circuit

Published:2023-06 Issue: Volume:774 Page:139843
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Yan Han,Zhang Yinchan,Niu Xinhuan,Wang Jianchao,Yang Chenghui,Luo Fu,Qu Minghui,Shi Yunhui,Wang Ru

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference45 articles.

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5. Effect of non-ionic surfactant on Cu dishing and dielectric erosion correction in alkaline barrier CMP solution free of inhibitors;Z.hang;ECS J. Solid State Sci. Technol.,2017

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