A study on the effects of two reactive gases in the reactive sputtering process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Plasma cathode—surface interaction in reactive magnetron sputtering for indium—tin-oxide thin film deposition
2. Two-dimensional spatial distributions of sputtered particles produced in a planar magnetron discharge of indium-tin-oxide target
3. Two-dimensional spatial profiles of plasma parameters in DC reactive magnetron sputtering of indium-tin-oxide
4. New thermochromic bilayers for optical or electronic switching systems
5. Handbook of Thin Film Process Technology;Berg,1998
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