Microstructure characterization of nano-structured Cr/Cr2N multilayer films produced through radio frequency magnetron sputtering-Reference-Cited by-同舟云学术

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Microstructure characterization of nano-structured Cr/Cr2N multilayer films produced through radio frequency magnetron sputtering

Published:2014-01 Issue: Volume:550 Page:272-277
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Marulanda D.M.,Lousa A.,Martinez-de-Olcoz L.,Olaya J.J.

Funder

“Fundación para la promoción de la investigación y la tecnología — FPIT” of Colombia

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization

2. Characteristics of DC Reactively Sputtered (Ti,Zr)N Thin Films as Diffusion Barriers for Cu Metallization

3. Diffusion barrier properties of nano-crystalline TiZrN films in Cu/Si contact systems

4. Evaluation of the thermal stability of reactively sputtered (Ti, Zr)Nx nano-thin films as diffusion barriers between Cu and Silicon

5. Sputtered Cr and Reactively Sputtered CrN x Serving as Barrier Layers Against Copper Diffusion

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microstructure, mechanical properties and thermal stability of Cr/WC nano-multilayered coating synthesized by ion beam sputtering;Thin Solid Films;2023-11

2. Cr-Based Sputtered Decorative Coatings for Automotive Industry;Materials;2021-09-24

3. Mechanical Properties and Diffusion Barrier Performance of CrWN Coatings Fabricated through Hybrid HiPIMS/RFMS;Coatings;2021-06-09

4. Characteristics and properties of Cr N compound layer produced by plasma nitriding of Cr-electroplated of AISI 304 stainless steel;Surface and Coatings Technology;2020-03

5. δ-A15 and bcc phases coexist in sputtered chromium coatings with moderate oxygen contents;Thin Solid Films;2020-01

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