Effect of substrate temperature on surface roughness and optical properties of Ta2O5 using ion-beam sputtering-Reference-Cited by-同舟云学术

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Effect of substrate temperature on surface roughness and optical properties of Ta2O5 using ion-beam sputtering

Published:2005-03 Issue:1-2 Volume:475 Page:239-242
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Yoon S.G.,Kim H.K.,Kim M.J.,Lee H.M.,Yoon D.H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Ion-assisted deposition of optical thin films: low energy vs high energy bombardment

2. Morphology of dual beam ion sputtered films investigated by atomic force microscopy

3. Ion beam sputtering of optical coatings

4. Properties of silicon and aluminum oxide thin films deposited by dual ion beam sputtering

5. Ion Beam Sputter Deposition Of Optical Coatings

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1. Coupling effects of W alloying with preparation temperature on microstructures and irradiation tolerance of nanostructured Cu films;Vacuum;2023-04

2. Progress in Optimization of Physical Vapor Deposition of Thin Films;Advances in Civil and Industrial Engineering;2021

3. Multifractal and optical bandgap characterization of Ta2O5 thin films deposited by electron gun method;Optical and Quantum Electronics;2020-01-29

4. Effects of oxygen flows on optical properties, micro-structure and residual stress of Ta 2 O 5 films deposited by DIBS;Optik;2018-08

5. Long Propagating Bloch Surface Waves Using Ion Beam Sputtering Technology;Advanced Photonics 2018 (BGPP, IPR, NP, NOMA, Sensors, Networks, SPPCom, SOF);2018

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