Effect of substrate properties and thermal annealing on the resistivity of molybdenum thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. C-growth of d.c.-sputtered Mo and W thin films
2. Microstructure and residual stress of very thin Mo films
3. Silicon Materials—Processing, Characterization and Reliability, San Francisco, April 2002;Amada,2002
4. Texturing effects in molybdenum and aluminum nitride films correlated to energetic bombardment during sputter deposition
5. Low-resistivity Mo thin films prepared by evaporation onto cm glass substrates
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