Nanoindentation stress–strain curves of plasma-enhanced chemical vapor deposited silicon oxide thin films-Reference-Cited by-同舟云学术

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Nanoindentation stress–strain curves of plasma-enhanced chemical vapor deposited silicon oxide thin films

Published:2008-02 Issue:8 Volume:516 Page:1941-1951
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Cao Zhiqiang,Zhang Xin

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference35 articles.

1. The MEMS Handbook;Gad-el-Hak,2002

2. Fundamentals of Microfabrication: The Science of Miniaturization;Madou,2002

3. The Material Science of Thin Films;Ohring,1992

4. Thin Film Materials: Stress, Defect Formation and Surface Evolution;Freund,2004

5. Macro Power from Micro Machinery

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