Effect of the argon flow rate and substrate temperature on the structural, morphological, optical and electrical properties of SbxTey thin films grown by radio-frequency sputtering-Reference-Cited by-同舟云学术

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Effect of the argon flow rate and substrate temperature on the structural, morphological, optical and electrical properties of SbxTey thin films grown by radio-frequency sputtering

Published:2024-08 Issue: Volume:802 Page:140439
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Vázquez-Barragán N.E.,Quiñones-Galván J.G.,Busani Tito^ORCID,Santos-Cruz J.,de Moure-Flores F.^ORCID

Publisher

Elsevier BV

Reference78 articles.

1. Differences in Sb2Te3 growth by pulsed laser and sputter deposition;Ning;Acta Mater.,2020

2. Enhanced thermoelectric properties of Sb2Te3 and Bi2Te3 films for flexible thermal sensors;Vieira;J. Alloys. Compd.,2019

3. Electronic structure, elastic and optical properties of Bi2Te3/Sb2Te3 thermoelectric composites in the periodic-superlattice thin films;Fu;Composites Commun.,2021

4. Empirical modelling and optimization of pre-heat temperature and Ar flow rate using response surface methodology for stoichiometric Sb2Te3 thin films prepared by RF magnetron sputtering;Khumtong;J. Alloys. Compd.,2017

5. Improving the thermoelectric properties of thick Sb2Te3 film via Cu doping and annealing deposited by DC magnetron sputtering using a mosaic target;Theekhasuk;Current Appl. Phys.,2021

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