In situ study on the growth of microcrystalline silicon film using the high-density microwave plasma for Si thin film solar cells
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Low Temperature Growth of Amorphous and Polycrystalline Silicon Films from a Modified Inductively Coupled Plasma
2. Fast Deposition of Microcrystalline Silicon Using High-Density SiH4Microwave Plasma
3. Proc. of 16th Symp. on Plasma Sci. for Mater. (Tokyo University, Japan, June 4–5th);Niikira,2003
4. The Generation of High-Density Microwave Plasma and Its Application to Large-Area Microcrystalline Silicon Thin Film Formation
5. Novel High-Density Microwave Plasma Utilizing an Internal Spoke Antenna for Fast Deposition of Microcrystalline Silicon Films
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The Study of Microcrystalline Silicon Thin Films Prepared by PECVD;Key Engineering Materials;2013-01
2. Real time and ex situ spectroscopic ellipsometry analysis microcrystalline silicon thin films growth;Acta Physica Sinica;2012
3. Influence of Boron doping on microcrystalline silicon growth;Chinese Physics B;2011-09
4. Diagnostics of the atmospheric pressure plasma jets for plasma enhanced chemical vapor deposition of polycrystalline silicon thin film;Acta Physica Sinica;2010
5. Photovoltaics literature survey (No. 47);Progress in Photovoltaics: Research and Applications;2006
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3