Comparison of the structural and optic al properties of amorphous silicon thin films prepared by direct current, bipolar pulse, and high-power impulse magnetron sputtering methods-Reference-Cited by-同舟云学术

Comparison of the structural and optic al properties of amorphous silicon thin films prepared by direct current, bipolar pulse, and high-power impulse magnetron sputtering methods

Published:2022-04 Issue: Volume:747 Page:139140
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lakhonchai Anthika,Chingsungnoen Artit^ORCID,Poolcharuansin Phitsanu^ORCID,Pasaja Nitisak,Bunnak Phuwanai^ORCID,Suwanno Mongkhol

Funder

Mahasarakham University

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

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