A thin film force sensor on AISI 5140 steel surface with multilayer SI3N4/AL2O3 film as insulation structure
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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4. Detection of Amyloid Beta Fibril Growth by Liposome-Immobilized Micro-Cantilever with NiCr Thin-Film Strain Gauge;Sohgawa;IEEE. Sens. J,2015
5. In-situ strain measurement with metallic thin film sensors;Taylor,2012
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