Improvement in ferroelectric properties of Pt/PZT/Pt capacitors etched as a function of Ar/O2 gas mixing ratio into Cl2/CF4 plasma-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Improvement in ferroelectric properties of Pt/PZT/Pt capacitors etched as a function of Ar/O2 gas mixing ratio into Cl2/CF4 plasma

Published:2004-07 Issue:1-2 Volume:459 Page:71-75
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lim Kyu-Tae,Koo Seong-Mo,Kim Kyoung-Tae,Kim Dong-Pyo,Kim Chang-Il

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Reactive ion etching of Pb(Zr[sub x]Ti[sub 1−x])O[sub 3] thin films in an inductively coupled plasma

2. Growth of High Quality Mg-doped GaAs by molecular Beam Epitaxy and Its properties

3. Dry Etching Characteristics of Pb(Zr,Ti)O3Films in CF4and Cl2/CF4Inductively Coupled Plasmas

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of thickness on the structural, ferroelectric and dielectric properties of (Nb,Fe)-codoped Na0.5Bi0.5TiO3 thin film;Journal of Materials Science: Materials in Electronics;2017-08-30

2. Leakage Current and Dielectric Properties of Integrated Ferroelectric Capacitor Etched in Non-Crystalline Phase;Integrated Ferroelectrics;2012-01

3. Structural, ferroelectric and dielectric properties of In2O3:Sn (ITO) on PbZr0.53Ti0.47O3 (PZT)/Pt and annealing effect;Journal of Alloys and Compounds;2011-05

4. AN INNOVATED PROCESS OF Pt/PbTiO3/PbZr0.3Ti0.7O3/PbTiO3/Pt INTEGRATED FERROELECTRIC CAPACITORS FOR FeRAM;Integrated Ferroelectrics;2007-04-18

5. Hydrogen sensing by NKN thin film with high dielectric constant and ferroelectric property;Sensors and Actuators B: Chemical;2005-07

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3