Effect of thermal annealing on structural and electrical properties of tio2 thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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5. Deposition of SiO2 and TiO2 thin films by plasma enhanced chemical vapor deposition for antireflection coating;Martinet;J. Non. Cryst. Solids.,1997
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