Author:
Cartailler Vivien,Imbert Grégory,Rochat Névine,Chaton Catherine,Vo-Thanh Du,Benoit Daniel,Duchamp Geneviève,Frémont Hélène
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films;Microelectronic Engineering;2022-08
2. 2D Model for moisture diffusion in integrated Low-k dielectrics;2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2022-04-25