Effect of moving speed during in-line pulsed direct-current magnetron sputtering deposition on the structural and optical properties of Al-doped ZnO films-Reference-Cited by-同舟云学术

Effect of moving speed during in-line pulsed direct-current magnetron sputtering deposition on the structural and optical properties of Al-doped ZnO films

Published:2017-09 Issue: Volume:638 Page:144-152
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kim Sung Yong,Cho Eou-Sik,Kwon Sang Jik

Funder

Ministry of Education

Gachon University

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Present status and future prospects for development of non- or reduced-indium transparent conducting oxide thin films;Minami;Thin Solid Films,2008

2. Transparent conductors as solar energy materials: a panoramic review;Granqvist;Sol. Energy Mater. Sol. Cells,2007

3. Thickness study of Al:ZnO film for application as a window layer in Cu(In1−xGax)Se2 thin film solar cell;Islama;Appl. Surf. Sci.,2011

4. Structure and morphology of aluminium doped Zinc-oxide layers prepared by atomic layer deposition;Németh;Thin Solid Films,2008

5. New technologies for CIGS photovoltaics;Delahoy;Sol. Energy,2004

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Process Optimization of Aluminum-Doped Zinc Oxide Films by In-Line Pulsed-DC Sputtering and Its Application to Resistive Touch Panels;SCI ADV MATER;2020

2. Large-area spray deposited Ta-doped SnO2 thin film electrode for DSSC application;Solar Energy;2020-11

3. Water vapor transmission rate property of SiNx thin films prepared by low temperature (< 100 degrees C) linear plasma enhanced chemical vapor deposition;VACUUM;2018