Microstructure and stress gradients in TiW thin films characterized by 40 nm X-ray diffraction and transmission electron microscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. The microstructure of sputter-deposited coatings;Thornton;J. Vac. Sci. Technol. A,1986
2. High power impulse magnetron sputtering discharge;Gudmundsson;J. Vac. Sci. Technol A,2012
3. Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron source;Hoffman;J. Vac. Sci. Technol.,1982
4. Determination of film stresses during sputter deposition using an in situ probe;Hoffman;J. Vac. Sci. Technol A,1985
5. The origin of stress in sputter-deposited tungsten films for x-ray masks;Itoh;J. Vac. Sci. Technol B,1991
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