Influence of substrate cooling on ion conductivity of tantalum oxide thin films prepared by reactive sputtering using water vapor injection
Author:
Funder
JSPS KAKENHI
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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3. Solid state Gd–Mg electrochromic devices with ZrO2Hx electrolyte;van der Sluis;Electrochim. Acta,2001
4. Optical and electrochemical properties of all-solid-state transmittance-type electrochromic devices;Niwa;Thin Solid Films,2010
5. Effects of substrate cooling during sputter deposition of hydrogen-containing Ta2O5 thin films in H2O atmosphere on their ion conductivity;Abe;Jpn. J. Appl. Phys.,2008
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