Properties of silicon nitride thin overlays deposited on optical fibers — Effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor

Author:

Śmietana M.ORCID,Dominik M.,Myśliwiec M.,Kwietniewski N.,Mikulic P.,Witkowski B.S.,Bock W.J.

Funder

National Centre for Research and Development

Polish National Science Centre

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference39 articles.

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3. Fiber optic long period grating sensors with a nanoassembled mesoporous film of SiO2 nanoparticles;Korposh;Opt. Express,2010

4. Stack of PECVD silicon nitride nano-films on optical fiber end-face for refractive index sensing;Śmietana;Proc. SPIE,2014

5. Uniform deposition of SiC thin films on plastics surfaces;Anma;Vacuum,2000

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