Author:
Trueba M.,Gonzalez D.,Elizalde M.R.,Martínez-Esnaola J.M.,Hernandez M.T.,Li H.,Pantuso D.,Ocaña I.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. Mechanical properties of thin films;Nix;Met. Mater. Trans. A,1989
2. The thermomechanical integrity of Thin films and Multilayers;Evans;Acta Metall. Mater.,1995
3. Cracking and debonding in integrated microstructures;Liu,1998
4. Silicon integrated circuit technology from past to future, Microelectron;Iwai;Reliability,2002
5. Integration of fluorine-doped silicon oxide in copper pilot line for 0.12-μm technology;Reynard;Microelectron. Eng.,2002
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献