Property variations of direct-current reactive magnetron sputtered copper oxide thin films deposited at different oxygen partial pressures

Author:

Lu Hsin-Chun,Chu Chun-Lung,Lai Chi-You,Wang Yu-Hsiang

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

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