Plasma emission controlled multi-target reactive sputtering for in-situ crystallized Pb(Zr,Ti)O3 thin films on 6″ Si-wafers-Reference-Cited by-同舟云学术

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Plasma emission controlled multi-target reactive sputtering for in-situ crystallized Pb(Zr,Ti)O3 thin films on 6″ Si-wafers

Published:2007-02 Issue:7-8 Volume:515 Page:3547-3553
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Vidyarthi V.S.,Lin W.-M.,Suchaneck G.,Gerlach G.,Thiele C.,Hoffmann V.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Sputter-Deposition of [111]-Axis Oriented Rhombohedral PZT Films and Their Dielectric, Ferroelectric and Pyroelectric Properties

2. In situ Sputter Deposition of PbTiO3 Thin Films on Different Substrates: Influence of the Growth Temperature and the Sputtered Lead Flux on the Perovskite Phase Formation

3. Ferroelectric Memories

4. Electrical characteristics of ferroelectric PZT thin films for DRAM applications

5. An experimental 512-bit nonvolatile memory with ferroelectric storage cell

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1. Effect of sputtering-target composition on the structure, dielectric, ferroelectric, and energy storage properties of highly (00l)-oriented Ba(ZrxTi1–x)O3 films;Journal of Vacuum Science & Technology B;2023-06-29

2. Thin Films for Electrocaloric Cooling Devices;Recent Advances in Thin Films;2020

3. Challenges in Sr2FeMoO6−δThin Film Deposition;physica status solidi (b);2019-10-08

4. Connected Lead Zirconate Titanate Nanodot Arrays for Perspective Functional Materials;Journal of Nanoscience;2013-06-25

5. Lead-free (Ba,Ca)(Zr,Ti)O3 Based Electrocaloric Devices: Challenges and Perspectives;MRS Proceedings;2013

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