Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference68 articles.
1. Specular spectroscopic scatterometry;Niu;IEEE Trans. Semicond. Manuf.,2001
2. Scatterometry for semiconductor metrology;Raymond,2001
3. Overview of scatterometry applications in high volume silicon manufacturing;Raymond,2005
4. Advances in CD-metrology (CD-SAXS, Mueller matrix based scatterometry, and SEM);Thiel,2011
5. Rigorous coupled-wave analysis of planar-grating diffraction;Moharam;J. Opt. Soc. Am.,1981
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