Orientation control of Platinum electrode grown on silicon using [Ca2Nb3O10]− nanosheets as seed layer.

Author:

Manguele J.J.ORCID,Baudouin F.,Cibert C.ORCID,Domengès B.,Demange V.,Guilloux-Viry M.,Fouchet A.,Poullain G.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference66 articles.

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2. Influence of orientation and oxygen content on electrical properties of in situ deposited PZT thin films;Rhun;Ferroelectrics,2003

3. Epitaxial growth of Pt (001) thin films on MgO (001) under oxidizing conditions;Cui;MRS Online Proceedings Library Archive,1993

4. Orientation and composition dependence of piezoelectric-dielectric properties of sputtered Pb(Zrx,Ti1−x)O3 thin films;Hiboux,1999

5. Combined effect of preferential orientation and Zr/Ti atomic ratio on electrical properties of Pb(ZrxTi1−x)O3 thin films;Gong;J. Appl. Phys.,2004

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