Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition-Reference-Cited by-同舟云学术

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Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition

Published:2016-10 Issue: Volume:616 Page:628-634
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Sampath Sridhar,Maydannik Philipp,Ivanova Tatiana,Homola Tomáš,Sillanpää Mika,Nagumothu Rameshbabu,Alagan Viswanathan

Funder

European Regional Development Fund

Ministry of Education Youth and Sports of Czech Republic

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. Novel silicon surface passivation by porous silicon combined with an ultrathin Al2O3 film;Salem;J. Mater. Sci. Mater. Electron.,2013

2. Nanocrystalline porous silicon: structural, optical, electrical and photovoltaic properties;Arenas,2009

3. Monocrystalline silicon surface passivation by Al2O3/porous silicon combined treatment;Ben Rabha;Mater. Sci. Eng. B,2013

4. Porous silicon fabrication by anodization: Progress towards the realisation of layers and powders with high surface area and micropore content;Loni;Microporous Mesoporous Mater.,2015

5. Homogeneous luminescent stain etched porous silicon elaborated by a new multi-step stain etching method;Hajji;Appl. Surf. Sci.,2013

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2. Near-infrared transmissive properties of porous Si/Al2O3 photonic crystal band gaps;Materials Today Communications;2022-12

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4. Tribological performances of BP/TiO2 nanocomposites as water-based lubrication additives for titanium alloy plate cold rolling;Wear;2022-04

5. Effects of Atomic-Layer-Deposition temperature on the properties of Al2O3 insulators and InAlZnO Thin-Film-Transistors with Dual-Active-Layer structure;Applied Surface Science;2022-03

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