Epitaxial growth of TiC on (0001) 4H-SiC substrate by reactive sputtering

Author:

Chiu Kun-AnORCID,Lin Jing-Feng,Lin Kuan-Yu,Wu Ping-Hsun,Chen Hsueh-IORCID,Ko Cheng-Jung,Chen Chun-HuaORCID,Chang Li

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference36 articles.

1. Handbook of Refractory Carbides and Nitrides;Pierson,1996

2. Very high rate reactive sputtering of TiN, ZrN and HfN;Sproul;Thin Solid Film.,1983

3. Properties of TiN, ZrN and ZrTiN coatings prepared by cathodic arc evaporation;Musil;Mater. Sci. Eng. A,1993

4. Wear-resistant hard titanium carbide coatings for space applications;Boving;Tribol. Int.,1990

5. Structure and corrosion resistance of Ti/TiC coatings fabricated by plasma immersion ion implantation and deposition on nickel–titanium;Shanaghi;Surf. Coat. Technol.,2013

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