Relation of hardness and oxygen flow of Al2O3 coatings deposited by reactive bipolar pulsed magnetron sputtering-Reference-Cited by-同舟云学术

Relation of hardness and oxygen flow of Al2O3 coatings deposited by reactive bipolar pulsed magnetron sputtering

Published:2006-01 Issue:1-2 Volume:494 Page:255-262
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Bobzin Kirsten,Lugscheider Erich,Maes Michel,Piñero Carmen

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference14 articles.

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2. Rohstoff-Werkstoff-Werkstoffkomponente;Petzold,1991

3. Alumina as a Ceramic Material;Gitzen,1970

4. Deposition of hard crystalline Al2O3 coatings by bipolar pulsed d.c. PACVD

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