Author:
Kim Seong Bong,Namkung Won,Cho Moohyun,Kim Dae Chul,Yoo Suk Jae
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Hyperthermal neutral beam sources for material processing (invited)
2. S.B. Kim, D.C. Kim, S.J. Yoo, M. Cho, and W. Namkung, Rev. Sci. Instrum. (to be published).
3. Ion energy distributions and sheath voltages in a radio-frequency-biased, inductively coupled, high-density plasma reactor
4. Ion kinetic‐energy distributions in argon rf glow discharges
5. K.R. Kim, Ph.D. Dissertation, Kyungpook National University, 1998.