Silicon nanocrystals synthesized by electron-beam co-evaporation method and their application for nonvolatile memory-Reference-Cited by-同舟云学术

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Silicon nanocrystals synthesized by electron-beam co-evaporation method and their application for nonvolatile memory

Published:2009-10 Issue:24 Volume:517 Page:6659-6662
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Chen Chen,Jia Rui,Liu Ming,Li Weilong,Zhu Chenxin,Li Haofeng,Zhang Peiwen,Xie Changqing,Wang Qin,Ye Tianchun

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. A silicon nanocrystals based memory

2. Electron Devices Meeting, 2000. IEDM Technical Digest. International;De Blauwe,2000

3. Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International;De Salvo,2003

4. Light Emission From Hydrogenated and Unhydrogenated Si-Nanocrystal/Si Dioxide Composites Based on PECVD-Grown Si-Rich Si Oxide Films

5. Growth of Si nanocrystals on alumina and integration in memory devices

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of hydrogen ion beam treatment on Si nanocrystal/SiO2 superlattice-based memory devices;Applied Surface Science;2016-03

2. Crystallization and phase separation mechanism of silicon oxide thin films fabricated via e-beam evaporation of silicon monoxide;physica status solidi (c);2015-11

3. Formation of silicon nanocrystals embedded in high-κ dielectric HfO2 and their application for charge storage;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-03

4. Enhanced charge storage characteristics of silicon nanocrystals fabricated by electron-beam coevaporation of Si and SiO[sub x(x=1 or 2)];Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009

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