Fabrication of TaOxNy thin films by reactive ion beam-assisted ac double magnetron sputtering for optical applications-Reference-Cited by-同舟云学术

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Fabrication of TaOxNy thin films by reactive ion beam-assisted ac double magnetron sputtering for optical applications

Published:2016-09 Issue: Volume:615 Page:351-357
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Bah Souleymane T.,Ba Cheikhou O.F.,D'Auteuil Marc,Ashrit P.V.,Sorelli Luca,Vallée Réal

Funder

Natural Sciences and Engineering Research Council of Canada

Canada Foundation for Innovation

Fonds de recherche du Québec – Nature et technologies

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference28 articles.

1. The biocompatibility of the tantalum and tantalum oxide films synthesized by pulse metal vacuum arc source deposition;Leng;Nucl. Instr. Meth. Phys. B,2006

2. Biomedical properties of tantalum nitride films synthesized by reactive magnetron sputtering;Leng;Thin Solid Films,2001

3. Study of nanocrystalline Ta(N,O) diffusion barriers for use in Cu metallization;Stavrev;Microelectron. Eng.,1997

4. Optical, electrical and mechanical properties of the tantalum oxynitride thin films deposited by pulsing reactive gas sputtering;Le Dréo;Thin Solid Films,2006

5. Evanescent field sensors based on tantalum pentoxide waveguides – a review;Schmitt;Sensors,2008

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1. Nanomechanical and Nanotribological Properties of Nanostructured Coatings of Tantalum and Its Compounds on Steel Substrates;Nanomaterials;2021-09-15

2. Physico-chemical and antimicrobial properties of Ag/Ta2O5 nanocomposite coatings;Ceramics International;2021-09

3. Case Study III: Defect Engineering of Ta2O5, Ta3N5, and TaON;Nanostructured Photocatalyst via Defect Engineering;2021

4. Low-loss GeO2thin films deposited by ion-assisted alternating current reactive sputtering for waveguide applications;Thin Solid Films;2020-09

5. Spectroscopic study on amorphous tantalum oxynitride thin films prepared by reactive gas-timing RF magnetron sputtering;Applied Surface Science;2019-10

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