TaSiN nanocomposite thin films: Correlation between structure, chemical composition, and physical properties-Reference-Cited by-同舟云学术

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TaSiN nanocomposite thin films: Correlation between structure, chemical composition, and physical properties

Published:2014-05 Issue: Volume:558 Page:104-111
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Ramírez G.,Oezer D.,Rivera M.,Rodil S.E.,Sanjinés R.

Funder

Swiss National Science Foundation

PAPIIT-UNAM

CONACYT

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference40 articles.

1. Transition Metal Carbides and Nitrides;Toth,1971

2. Material selection for hard coatings

3. Epitaxial NaCl structure δ-TaNx(001): Electronic transport properties, elastic modulus, and hardness versus N/Ta ratio

4. Waveguide superconducting single-photon detectors for integrated quantum photonic circuits

5. Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization

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1. Phase separation within NiSiN coatings during reactive HiPIMS discharges: A new pathway to grow NixSi nanocrystals composites at low temperature;Applied Surface Science;2018-10

2. Effect of the addition of Si into V2O5 coatings: Structure and tribo-mechanical properties;Surface and Coatings Technology;2018-09

3. Effect of the addition of Si into Nb2O5 coatings on their structural, optical, and mechanical properties;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2016-07

4. Reduction of the coefficient of friction of niobium nitride coatings by the addition of bismuth;Vacuum;2016-03

5. Effect of Si addition on the structure and corrosion behavior of NbN thin films deposited by unbalanced magnetron sputtering;Applied Physics A;2016-01-28

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