Funder
Chinese Academy of Sciences
National Basic Research Program of China
National High Technology Research and Development Program (863) of China
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Ellipsometry and Polarized Light;Azzam,1977
2. Handbook of Ellipsometry;Tompkins,2005
3. Spectroscopic Ellipsometry: Principles and Application;Fujiwara,2009
4. Ueber Oberflächenschichten. I. Theil
5. Detection of thickness uniformity of film layers in semiconductor devices by spatially resolved ellipso-interferometry
Cited by
3 articles.
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