Thickness effect on the formation of SiC nanoparticles in sandwiched Si/C/Si and C/Si multilayers-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Thickness effect on the formation of SiC nanoparticles in sandwiched Si/C/Si and C/Si multilayers

Published:2009-08 Issue:20 Volume:517 Page:5867-5871
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Chung C.K.,Wu B.H.,Chen T.S.,Peng C.C.,Lai C.W.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. SiC MEMS: opportunities and challenges for applications in harsh environments

2. A low-temperature CVD process for silicon carbide MEMS

3. Vibrational density of states in silicon carbide nanoparticles: experiments and numerical simulations

4. Growth of SiC nanoparticle films by means of RF magnetron sputtering

5. AFM observation of nanosized SiC dots prepared by ion beam deposition

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Growth of amorphous SiC film on Si by means of ion beam induced mixing;Applied Surface Science;2012-12

2. Nano silicon top-layer for composite-induced multiphasic enhancement of thermal stability of hardness of diamond-like carbon nanofilm at 900°C;Surface and Coatings Technology;2012-06

3. High-energy heavy ion beam annealing effect on ion beam synthesis of silicon carbide;Surface and Coatings Technology;2011-11

4. Formation of SiC nanoparticles of two-layer C/Si films on the Si substrate using thermal annealing;Thin Solid Films;2008-12

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3