Author:
Liu Hai-Yun,Li Wei-Hua,Zhou Zai-Fa,Huang Qing-An
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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2. Foundations of MEMS;Liu,2006
3. The MEMS Handbook;Gad-el-Hak,2002
4. Lattice Constants and Thermal Expansivities of Silicon and of Calcium Fluoride between 6° and 322°K
5. X‐Ray Lattice Constants of Crystals by a Rotating‐Camera Method: Al, Ar, Au, CaF2, Cu, Ge, Ne, Si
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