Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance-Reference-Cited by-同舟云学术

Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance

Published:2014-09 Issue: Volume:567 Page:20-31
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Mammana Suelene S.,Greatti Alessandra,Luiz Francis H.,da Costa Francisca I.,Mammana Alaide P.,Calligaris Guilherme A.,Cardoso Lisandro P.,Mammana Carlos I.Z.,den Engelsen Daniel

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference35 articles.

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4. The effect of solvent on the etching of ITO electrode;Huang;Mater. Chem. Phys.,2004

5. On the homogeneity of sputter-deposited ITO films. Part II. Etching behaviour;van den Meerakker;Thin Solid Films,1995

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