Excimer UV-assisted preparation of zirconium silicate layers
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. MOS transistors with stacked SiO/sub 2/-Ta/sub 2/O/sub 5/-SiO/sub 2/ gate dielectrics for giga-scale integration of CMOS technologies
2. Intermixing at the tantalum oxide/silicon interface in gate dielectric structures
3. Stress and defects in silicate films and glasses
4. The Chemical Behavior of Zirconium;Blumenthal,1958
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2. Crystallization resistance of barium titanate zirconate ultrathin films from aqueous CSD: a study of cause and effect;Journal of Materials Chemistry;2009
3. Optical methods for microstructure determination of doped samples;16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics;2008-12-12
4. Thermal stability and energy-band alignment of nitrogen-incorporated ZrO2 films on Si(100);Applied Physics Letters;2006-06-05
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