Author:
Richter U.,Hentsch W.,Liepack H.,Kruse R.,Dittrich R.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference2 articles.
1. Optical investigations in a PEM controlled reactive magnetron sputter process for aluminium doped zinc oxide layers using metallic alloy targets
2. Semiconductor Equipment and Materials International (SEMI). SEMI E141-0705. Guide for specification of Ellipsometer equipment for use in integrated metrology.
Cited by
3 articles.
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