Homogenous and ultra-shallow lithium niobate etching by focused ion beam-Reference-Cited by-同舟云学术

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Homogenous and ultra-shallow lithium niobate etching by focused ion beam

Published:2020-03 Issue: Volume:62 Page:10-15
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Qu Minni^ORCID,Shen Yunliang,Wu Liying,Fu Xuecheng,Cheng Xiulan,Wang Ying

Funder

Key Research and Development Program of High Performance Computing in the 13th Five-Year Plan of the Ministry of Science and Technology of China

Shanghai R&D Public Service Platform Construction

Medical-Engineering (Science) Cross-Research Fund of Shanghai Jiao Tong University

Shanghai Jiao Tong University

Publisher

Elsevier BV

Subject

General Engineering

Reference37 articles.

1. Second harmonic generation in a high-Q lithium niobate microresonator fabricated by femtosecond laser micromachining;Lin;Sci China Phys Mech Astron,2015

2. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages;Wang;Nature,2018

3. Highly tunable efficient second-harmonic generation in a lithium niobate nanophotonic waveguide;Luo;Optica,2018

4. Nanophotonic lithium niobate electro-optic modulators;Wang;Opt Express,2018

5. High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation;Wang;Opt Express,2015

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1. High-efficiency nano-integrated input/output based on shallow-etched lithium niobate gratings;Optics and Lasers in Engineering;2024-07

2. Dewar Assembly Integrated with Cryogenic Optics for Dual-Band IR Detector;CHIN J LASERS;2023

3. Impact of Non-Vertical Sidewalls on Bandgap Characteristics of LiNbO₃ Photonic Crystals;2023 Asia Communications and Photonics Conference/2023 International Photonics and Optoelectronics Meetings (ACP/POEM);2023-11-04

4. Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams;Micromachines;2023-10-27

5. High-Performance Mach–Zehnder Modulator Based on Thin-Film Lithium Niobate with Low Voltage-Length Product;ACS Omega;2023-03-02

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