Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system

Author:

Bosmans Niels,Qian Jun,Reynaerts Dominiek

Funder

Institute for the Promotion of Innovation through Science and Technology in Flanders

EC FP7 FoF collaborative projects “MIDEMMA”

“Hi-Micro”

Publisher

Elsevier BV

Subject

General Engineering

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