Author:
Korpelainen V.,Seppä J.,Lassila A.
Reference38 articles.
1. VDI/VDE 2656 Part 1 Determination of geometrical quantities by using of Scanning Probe Microscopes—calibration of measurement systems.
2. Towards a guideline for SPM calibration nanoscale calibration standards and methods: dimensional and related measurements in the micro- and nanometer range;Dziomba,2005
3. Long-range AFM profiler used for accurate pitch measurements;Meli;Meas Sci Technol,1998
4. Accurate dimensional metrology with atomic force microscopy;Dixon;Proc SPIE 3998,2000
5. A sample scanning system with nanometre accuracy for quantitative SPM measurements;Picotto;Ultramicroscopy,2001
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