Vibration-resistant interference microscope with assistant focusing for on-machine measurement of surface topography-Reference-Cited by-同舟云学术

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Vibration-resistant interference microscope with assistant focusing for on-machine measurement of surface topography

Published:2020-11 Issue: Volume:66 Page:220-228
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Liu Qian,Zhang Hui,Huang Xiaojin,Cui Kaihua,Li Lulu,Yue Xiaobin

Funder

Science Challenging Project

Presidential Foundation of CAEP

Natural Science Foundation of China

Laboratory of Ultra-Precision Manufacturing Technology of CAEP

Publisher

Elsevier BV

Subject

General Engineering

Reference23 articles.

1. Lathe errors identification based on surface topography analysis after turning;Cao;Precis Eng,2016

2. Optical measurement of surface topography;Leach,2011

3. Principles of interference microscopy for the measurement of surface topography;De Groot;Adv Optic Photon,2015

4. In situ non-contact measurements of surface roughness;Quinsat;Precis Eng,2012

5. Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces;Zhu;Precis Eng,2016

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1. Research on the quality control technology of micro-topography machining based on in situ white light interferometry;Measurement;2023-10

2. Deblurring microscopic image by integrated convolutional neural network;Precision Engineering;2023-07

3. Coarse-to-fine auto-focus method using a white-and-red light source for white-light scanning interferometers;Optik;2023-04

4. Fast and in-situ correction of camera channel crosstalk based on Fourier transform of carrier fringes in multi-colour interferometry;Optics and Lasers in Engineering;2022-04

5. Scanning error detection and compensation algorithm for white-light interferometry;Optics and Lasers in Engineering;2022-01

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