Effect of inertia variations for active vibration isolation systems
Author:
Funder
Korea Institute of Industrial Technology
Korea Institute for Advancement of Technology
MOTIE
Publisher
Elsevier BV
Subject
General Engineering
Reference19 articles.
1. Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry;Schmidt;Phil Trans Royal Soc A Math Phys Eng Sci,2012
2. Advanced LIGO two-stage twelve-axis vibration isolation and positioning platform. Part 1: design and production overview;Matichard;Precis Eng,2015
3. Six degree of freedom vibration isolation platform for in-line nano-metrology;Thier;IFAC-PapersOnLine,2016
4. Recent advances in micro-vibration isolation;Liu;Mech Syst Signal Process,2015
5. An integrated approach to structural damping;Marsh;Precis Eng,1996
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