Lateral performance evaluation of laser micromachining by high precision optical metrology and image analysis

Author:

Daemi Bita,Ekberg Peter,Mattsson Lars

Funder

EC Grant

Publisher

Elsevier BV

Subject

General Engineering

Reference22 articles.

1. Fabrication of NanoMicro devices of metallic glasses;Fukuda,2013

2. Innovative manufacturing processes for plastics parts with micro features;Christian Hopmann,2013

3. Metrology challenges for highly parallel micro-manufacture;Richard Leach,2013

4. Miniaturized Sensors for Physical Fluid Properties in 4 M (Multi-Material Micro Manufacture);Jakoby,2012

5. Bio-plasmonics: nano/micro structure of surface plasmon resonance devices for biomedicine;Lin;Opt Quantum Electron,2005

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